Denka M3 LaB6 cathodes, FEI/Philips sterile To induce a negative charge

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Denka M3 LaB6 cathodes, FEI/Philips sterile To induce a negative chargeThe use of an electron beam enables not only observation of the submicron world (TEMs SEMs and X ray microanalysers) but also processing with submicron precision (electron beam lithography systems). The optimum cathode material for use in these instruments would possess the following properties: Low potential barrier (work function) High melting point and stability at high temperatures Low vapour pressure so as to reduce evaporation loss Chemical

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